Reducing programming disturbance in memory devices

ABSTRACT

Multiple apparatus and methods of the specification include a method that includes precharging channel material of a string of memory cells in an unselected sub-block of a block of memory cells to a precharge voltage during a first portion of a programming operation. A programming voltage can then be applied to a selected memory cell in a selected sub-block of the block of memory cells during a second portion of the programming operation. The selected memory cell is coupled to a same access line as an unselected memory cell in the unselected sub-block.

PRIORITY APPLICATION

This application is a continuation of U.S. application Ser. No.16/784,899, filed Feb. 7, 2020, which is a continuation of U.S.application Ser. No. 15/451,022, filed Mar. 6, 2017, now issued as U.S.Pat. No. 10,559,367, which is a continuation of U.S. application Ser.No. 13/647,179, filed Oct. 8, 2012, now issued as U.S. Pat. No.9,589,644, all of which are incorporated herein by reference in theirentireties.

BACKGROUND

Memory applications often incorporate high density non-volatile memorydevices where retention of memory contents is desired when no power issupplied to the memory device. For example, NAND memory, such as 3Dflash NAND memory, offers storage in the form of compact, high densityconfigurations. The compact nature of the 3D flash NAND structure meansword lines are common to many memory cells within a block of memory.

During a programming operation a selected memory cell(s) may beprogrammed with the application of a programming voltage to a selectedword line. Due to the word line being common to multiple memory cells,unselected memory cells may be subject to the same programming voltageas the selected memory cell(s). If not otherwise preconditioned, theunselected memory cells may experience effects from the programmingvoltage on the common word line. These programming effects compromisethe condition of charge stored in the unselected memory cells which areexpected to maintain stored data. This programming voltage effect istermed a “programming disturbance” or “programming disturb” effect bythose of ordinary skill in the art.

BRIEF DESCRIPTION OF DRAWINGS

Some embodiments are illustrated by way of example and not limitation inthe figures of the accompanying drawings in which:

FIG. 1 is an electrical schematic diagram of an apparatus in the form ofa string of memory cells, according to an example embodiment;

FIG. 2 is a cross-sectional view of a semiconductor construction of thestring shown in FIG. 1, according to an example embodiment;

FIG. 3 is an electrical schematic diagram of an apparatus in the form ofa block of memory cells, according to an example embodiment;

FIG. 4 is a timing diagram for the block of FIG. 3 during a programmingoperation, according to an example embodiment;

FIG. 5 is a flow chart illustrating a method to reduce programmingdisturb effects in a memory, according to an example embodiment; and

FIG. 6 is a block diagram of an apparatus in the form of a memory device600, according to an example embodiment.

DETAILED DESCRIPTION

In the following description, for purposes of explanation, numerousspecific details are set forth in order to provide a thoroughunderstanding of some example embodiments. It will be evident, however,to one of ordinary skill in the art that various embodiments of theinvention may be practiced without these specific details.

NAND memory, such as 3D flash NAND, offers electronically programmedmemory in compact high density configurations that are non-volatile.These nonvolatile memories can be reprogrammed, read, and erasedelectronically. To achieve high density, a string of memory cells in a3D NAND device may be constructed to include 32 or more memory cells atleast partially surrounding a pillar of channel material. The memorycells may be coupled to access lines, which are commonly referred to inthe art and this application as “word lines”, often fabricated in commonwith the memory cells, so as to form an array of strings in a block ofmemory according to some embodiments.

In this type of 3D NAND structure, word lines are common to many memorycells during a programming operation intended to be performed on aselected memory cell(s) at the time. The unselected memory cells coupledto the same word line as the selected memory cell(s) experience the sameprogramming voltage as the selected cell(s). The programming voltage onthe common word line may produce programming disturb effects inunselected memory cells that render the charge stored in the unselectedmemory cells unreadable altogether or, although still apparentlyreadable, the contents of the memory cell may be read as a data valuedifferent than the intended data value stored before application of theprogramming voltage.

The program disturb effect is often experienced when the channelmaterial of unselected memory cells are at a voltage sufficientlydifferent than the programming voltage. This difference in voltage mayinitiate an electrostatic field of sufficient magnitude to change thecharge on a corresponding charge storage structure and cause thecontents of the memory cell to be read incorrectly. The program disturbeffect can be even more pronounced when the channel material of theunselected cells are left in an arbitrary or an initial state and nototherwise preconditioned to be resistant to the programming voltage.

Due to the variations in fabrication across the extent of a memorydevice, certain cells may require a programming voltage higher than thenominal magnitude for the device. This increase in the requiredprogramming voltage may be about 2-3 Volts (V) above the nominalprogramming voltage in some cases. This additional magnitude of voltage,although required for programming particular memory cells, can also besufficient to trigger undesirable programming (program disturb) inunselected memory cells.

According to some embodiments described herein, an additional voltagemay be applied to the channel material of the strings of memory cells ina block of memory during a precharge portion of a programming operation.The additional precharge voltage may be on the order of 2-3V accordingto certain example embodiments. The precharge voltage may be sufficientto allow general use of a higher programming voltage that is required toovercome hard to program memory cells. These increased programmingvoltages, when used with the included methods, may be used to programstubborn memory cells, while significantly reducing the incidence of theprogram disturb effect that the elevated programming voltages mightotherwise bring about.

FIG. 1 is an electrical schematic diagram of an apparatus in the form ofa string 100 of memory cells, according to an example embodiment. Thesuing 100 includes memory cells 112 (i.e., charge storage devices); upto 32 cells 112 (or more) in some embodiments. The string 100 includes asource-side select transistor known as a source select gate 120 (SGS)(typically an n-channel transistor) coupled between a memory cell 112 atone end of the suing 100 and a common source 126.

The common source 126 may comprise, for example, a commonly dopedsemiconductor material and/or other conductive material. At the otherend of the string 100, a drain-side select transistor called a drainselect gate 130 (SGD) (typically an n-channel transistor) is coupledbetween one of the memory cells 112 and a data line 134, which iscommonly referred to in the art as a “bit line”. The common source 126can be coupled to a reference voltage (e.g., ground voltage or simply“ground” [Gnd]) or a voltage source (e.g., a charge pump circuit orpower supply which may be selectively configured to a particular voltagesuitable for optimizing a programming operation, for example).

Each memory cell 112 may include, for example, a floating gatetransistor or a charge trap transistor and may comprise a single levelmemory cell or a multilevel memory cell. The floating gate may bereferred to as a charge storage structure 135. The memory cells 112, thesource select gate 120, and the drain select gate 130 may be controlledby signals on their respective control gates 150.

The control signals may be applied to select lines (not shown) to selectstrings, or to access lines (not shown) to select memory cells 112, forexample. In some cases, the control gates can form a portion of theselect lines (for select devices) or access lines (for cells). The drainselect gate 130 receives a voltage that can cause the drain select gate130 to select or deselect the string 100. The string 100 can be one ofmultiple strings of memory cells in a block of memory cells in a NANDmemory device.

FIG. 2 is a cross-sectional view of a semiconductor construction 200 ofthe string 100 (FIG. 1), according to an example embodiment. The memorycells 112, the source select gate 120 and the drain select gate 130 atleast partially surround (e.g., surround or partially surround) a pillar210 of semiconductor material. The pillar 210 can comprise p typepolysilicon and is a channel material 255 for the memory cells 112, thesource select gate 120, and the drain select gate 130. The memory cells112, the source select gate 120, and the drain select gate 130 areassociated with the channel material 255. The channel material 255 canextend between a source cap 220 comprising n+ type polysilicon and adrain cap 230 comprising n+ type polysilicon.

The source cap 220 is in electrical contact with the channel material255 and forms a p-n junction with the channel material 255. The draincap 230 is in electrical contact with the channel material 255 and formsa p-n junction with the channel material 255. The source cap 220 is asource for the channel material 255 and the drain cap 230 is a drain forthe channel material 255. The source cap 220 is coupled to the commonsource 126 and may be coupled to a first supply 240. The drain cap 230is coupled to the data line 134 and may be coupled to a second supply250. A supply, such as the first supply 240 or the second supply 250 maybe implemented as a charge pump circuit, a power supply, or a voltagesource, among others.

FIG. 3 is an electrical schematic diagram of an apparatus in the form ofa block 300 of memory cells, according to an example embodiment. Theblock 300 may include a first sub-block 305 and a second sub-block 310of memory cells. Each of the sub-blocks 305,310 may include strings 100of memory cells extending in a number of, for example, many tens orhundreds (or more) according to memory organizations in some exampleembodiments. The ends of the strings 100, including the source selectgates 120, are coupled to the common source 126. The ends of the strings100, including drain select gates 130, are coupled respectively to datalines 334 a, 334 b, 334 c. The number of data lines in an exampleembodiment may extend in number to couple to each row of strings 100included in the associated organization of memory. The data lines 334 a,334 b, 334 c and additional data lines that may be included in aparticular example embodiment may extend to other blocks of memory cellsand be coupled to further strings in a similar fashion to that shown inblock 300. The drain select gates 130 of the strings 100 of the firstsub-block 305 are commonly coupled to a first select line 335. In asimilar fashion, the drain select gates 130 of the strings 100 of thesecond sub-block 310 are commonly coupled to a second select line 340.

In the block 300, the memory cells in a particular level of the blockare commonly coupled to a respective access line, regardless of whichsub-block they are in. For example, the memory cells 370 in a firstlevel of the block 300 are commonly coupled to a first access line 375.Likewise, the memory cells 360, 365 in a second level of the block 300are commonly coupled to a second access line 355. In example embodimentswhere more sub-blocks may be included in the block 300, the second levelof memory cells 365 in the additional sub-blocks would also be commonlycoupled to the access line 355. For clarity, not all access lines in theblock 300 are shown.

During a programming operation on a selected memory cell 360 in aselected sub-block (e.g., second sub-block 310), all memory cells 365 atthe same level within the respective strings 100 as the selected memorycell 360 are coupled to the same respective access line 355 and receivethe same programming voltage on the respective common access line 355.Similarly, for levels that do not include a memory cell 360 selected forprogramming, all memory cells 370 at the same level within theirrespective strings would receive the same voltage (e.g., a program passvoltage) on their respective common access line 375.

The presence of the programming voltage on the selected access line 355can cause a voltage difference between a control gate 150 and thechannel material 255 of the unselected memory cells 365 in theunselected sub-blocks (e.g., the first sub-block 305) in proportion tothe amount of capacitive coupling between the selected access line 355and the channel material. The potential of a program disturb effect dueto this voltage difference can be reduced by precharging the channelmaterial 255 of the memory cells 365 of the unselected sub-blocks (e.g.,first sub-block 305) prior to applying the programming voltage.

FIG. 4 is a timing diagram 400 for the block of FIG. 3 during aprogramming operation, according to an example embodiment. During aninitial (e.g., precharge) portion of the programming operation 444 a,the channel material 255 of all strings of a selected block of memorycells are pre-charged to approximately a supply voltage (VCC) of thememory device. By pre-charging the channel material 255 of all stringsin the selected block, a substantially uniform enhancement of theresistance to program disturb may be accomplished for all unselectedstrings of the block.

During a subsequent portion of the programming operation 444 b, thechannel material 255 of a selected string (e.g., the string includingselected memory cell 360) is coupled to a voltage configured to allowprogramming of a selected memory cell 360 of the string. Also duringthis subsequent portion of the programming operation 444 b, the channelmaterial 255 of the strings of the unselected sub-blocks of the blockare allowed to float (e.g., by grounding the select lines coupled totheir SGDs).

While the channel material 255 of the strings of the unselectedsub-block(s) of memory cells are allowed to float (i.e., after beingprecharged), a programming voltage is applied to the selected accessline 355. As the channel material 255 of the selected string is at avoltage configured to allow programming, application of the programmingvoltage to the selected memory cell 360 creates a voltage differencebetween the control gate of the selected memory cell 360 and its channelmaterial 255 sufficient to program the selected memory cell 360.However, as the channel material 255 of the strings of the unselectedsub-blocks of memory cells are floating at approximately VCC, thelikelihood of a voltage difference between the control gates of theunselected memory cells 365 and their channel material being high enoughto cause program disturb should be reduced.

Referring now to FIGS. 3 and 4, it can be seen that in the upper portionof the timing diagram 400 are shown data line voltages 434 a-434 c thatcorrespond to voltages on the data lines 334 a-334 c. In an initialportion of the programming operation 444 a, the data line voltages 434a-434 c can be driven to a voltage approximately equal to the supplyvoltage VCC, which can be equal to approximately 2V-3.3V according tocertain example embodiments. The data line voltages 434 a-434 c may alsobe driven to a further precharge voltage provided by a power supply orsome other source, such as a voltage that may be produced by firstsupply 240 or the second supply 250, according to a further exampleembodiment. The further precharge voltage may be configured to providean optimal precharge voltage condition on the channel material 255different from the readily available supply voltage VCC. The furtherprecharge voltage may be greater than approximately 3.3V but should notexceed a voltage that may damage the associated device (e.g., a gateoxide breakdown voltage).

Beneath the data line voltages 434 a-434 c in the timing diagram 400,are shown a first SGD voltage 435 on the select line 335 of anunselected sub-block 305 and a second SOD voltage 440 on the select line340 of a selected sub-block 310. In the initial portion of theprogramming operation 444 a, the first SOD voltage 435 and the secondSOD voltage 440 are brought high, to approximately 4V according to anexample embodiment, to enable the drain select gates 130 of the firstsub-block 305 and the second sub-block 310 to couple the data linevoltages 434 a-434 c to the channel material 255 of all strings 100 inthe block 300. In this way, a precharge voltage (e.g., approximatelyVCC) is applied to the channel material 255 of both the selected memorycell(s) 360 and the unselected memory cells 365. The voltages 460, 465on the channel material 255 of the selected memory cell(s) 360 and theunselected memory cells 365, respectively, are shown beneath the SODvoltages. The voltages 460, 465 may be approximately 2V-3.3V(approximately equal to VCC) in the initial portion of the programmingoperation 444 a.

Beneath the voltages 460, 465 are shown as voltages 455, 475 on aselected access line 355 and an unselected access line 375,respectively. During the initial portion of the programming operation444 a both the selected access line voltage 455 and the unselectedaccess line voltage 475 are driven to a pass voltage (e.g., about 10Vaccording to an example embodiment), to provide a conducting conditionin device channels (not shown) of the memory cells. The conductingcondition helps assure that no portions of the channel material 255 areisolated from a precharge voltage applied to the channel material 255 inthe initial portion of the programming operation 444 a that wouldotherwise degrade a precharge voltage and therefore reduce theresistance to programming disturb effects on the associated channelmaterial 255.

Beneath the access line voltages on the timing diagram 400 are showntunnel oxide voltages 425 a, 425 b corresponding to a voltage acrosstunnel oxides in the selected memory cell(s) 360 and the unselectedmemory cells 365 respectively. During an initial portion of aprogramming operation, the tunnel oxide voltages 425 a, 425 b may beapproximately 6.5-8V according to an example embodiment. During thisportion of the programming operation both tunnel oxide voltages may beapproximately equal to the difference between the respective access linevoltage and the channel material precharge voltage.

During the initial portion of the programming operation 444 a a voltage430 on the select line(s) coupled to the source select gates 120 ismaintained at approximately 0V to help keep the channel material 255 ofthe memory cells isolated from the common source 126.

Turning to the subsequent portion of the programming operation 444 b,the voltages 434 a, 434 c on data lines 334 a, 334 c coupled to stringsthat do not include a memory cell 360 selected for programming are at aprogram inhibit level. For example, in embodiments where a prechargevoltage level is equivalent to a program inhibit voltage level, voltages434 a and 434 c can be maintained at the same voltage level as in theinitial portion of the programming operation 444 a (e.g., approximatelyequal to a supply voltage VCC). In contrast, the voltage 434 b on datalines 334 b coupled to strings that include a memory cell 360 selectedfor programming can be lowered to a program enable voltage level. Forexample data line voltage 434 b can be reduced to approximately GND(e.g., 0V) by coupling the data line 334 b to the GND of the memorydevice, for example.

During the subsequent portion of the programming operation 444 b, thevoltage 435 on a select line 335 of an unselected sub-block 305 isdriven to approximately 0V, such as to ensure that the drain selectgates 130 of the unselected sub-block 305 do not conduct. Accordingly,the channel material 255 of the strings of the unselected sub-block 305is allowed to float while retaining the precharge voltage (e.g.,approximately equal to VCC) applied in the initial portion of theprogramming operation 444 a.

Subsequently, responsive to application of a programming voltage on aselected access line 365, the channel material voltage 465 of thestrings of the unselected sub-block is shown to rise from the prechargevoltage (approximately VCC) according to a coupled voltage induced onthe associated channel material 255 by the programming voltage on theselected access line 355. The addition of the induced coupled voltage tothe precharge voltage on the nonprogrammed channel material 255 is dueto the rise in the selected access line voltage 455 to approximately 20Vduring this portion of the programming operation.

During the subsequent portion of the programming operation 444 b, thevoltage 440 on a select line 340 of a selected sub-block 310 is drivento approximately 1V so that the drain select gates 130 of the selectedsub-block 310 conduct with an on-channel resistance sufficiently low toallow the program enable data line voltage 434 b (e.g., 0V) to beprovided on the corresponding channel material 255 associated with theselected memory cell 360. Correspondingly, the voltage 460 on thechannel material of the selected memory cell(s) is shown to attainapproximately the 0V level provided by the data line voltage 434 bduring this portion of the programming operation according to theexample embodiment as described above.

During the subsequent portion of the programming operation 444 b, theselected access line 355 provides the programming voltage ofapproximately 20V to the selected memory cell 360. Accordingly, theselected access line voltage 455 is shown to rise to the 20V level ofthe programming voltage during the subsequent portion of the programmingoperation. The programming voltage (i.e., the selected access linevoltage 455) applied to the control gate of the selected memory cell 360is sufficient to generate a programming electrostatic potential inapproximate proportion to a difference in voltage between theprogramming voltage applied to the access line and the program enabledchannel material voltage 460. Thus, the tunnel oxide voltage 425 a ofthe selected memory cell 360 will attain a voltage approaching the 20Vprogramming voltage but may actually be determined by the charge inducedon the corresponding charge storage structure 135 and the data valuebeing stored (i.e., a “1” or a “0”).

During the subsequent portion of the programming operation 444 b, thetunnel oxide voltage 425 b of the unselected memory cells 365 may beless than approximately 1V-2V, depending on the magnitude of the coupledvoltage, leakage currents, and device thresholds of the drain selectgates 130 involved in coupling the precharge voltage to the channelmaterial 255. The voltages 475 applied to the unselected access lines375 can remain at the 10V level provided in the initial portion of theprogramming operation 444 a. In this way, the conducting condition indevice channels (not shown) of the memory cells 112 is perpetuatedduring the subsequent portion of the program operation.

During the subsequent portion of the programming operation 444 b thevoltage 430 on the select line(s) coupled to the source select gates ismaintained at a value of approximately 0V to continue isolation of thechannel material 255 of the memory cells from the common source 126.

FIG. 5 is a flow chart illustrating a method of reducing programmingdisturb effects 500, according to an example embodiment. Referring nowto FIGS. 1-5, it can be seen that the method commences with a prechargevoltage being applied 510 to the data lines 334 a, 334 b, 334 c of ablock of memory cells. The method continues with applying 520 voltagesto the select devices 130 of the block of memory cells to couple thedata lines 334 a, 334 b, 334 c to associated channel material 255 ofstrings coupled to the data lines. For example, as shown in FIG. 4, thedrain select gates of the block can be coupled to one of the SGDvoltages 435, 440 in the initial portion of the programming operation444 a. The method continues with applying 530 pass voltages to theaccess lines of the block. For example, the access lines can be coupledto one of the access line voltages 455, 475 in the initial portion ofthe programming operation 444 a. Accordingly, the channel material ofthe strings of the block are precharged to the precharge voltage appliedto the data lines.

The method continues with decoupling 550 unselected sub-blocks of memorycells. For example, a SGD voltage 435 applied to the select lines of theunselected sub-blocks can be driven to approximately 0V. In thiscondition, the drain select gates 130 of the unselected sub-blocks 305do not conduct and thus allow the associated channel material 255 of theunselected sub-blocks to float while retaining the precharge voltage(approximately equal to VCC provided in the initial portion of theprogramming operation 444 a. The method continues on by applying 560 aprogram enable voltage (e.g., 0 V) to a selected data line 334 b coupledto a selected string of memory cells (e.g., a string that includes theselected memory cell 360).

The method goes on with the act of applying 570 a voltage to a selectdevice to couple the selected data line to the channel material of theselected string. For example, a SGD voltage 440 applied to a select line340 of the selected sub-block can be being driven to approximately 1V.Accordingly, the channel material of the selected string (and thus theselected memory cell) is at approximately the program enable voltageapplied to the selected data line.

The method concludes with applying 590 the programming voltage to theaccess line coupled to the selected memory cell 360. For example, theaccess line voltage 455 applied to the selected memory cell 360 can bedriven to a voltage of approximately 20V.

FIG. 6 is a block diagram of an apparatus in the form of a memory device600 according to various embodiments of the invention. The memory device600 is coupled to a control bus 605 to receive multiple control signalsover control signal lines 610. The memory device 600 is also coupled toan address bus 615 to receive address signals on address signal lines620 and is further coupled to a data bus 625 to transmit and receivedata signals. Although depicted as being received on separate physicalbusses, the data signals could also be multiplexed and received on thesame physical bus.

The memory device 600 includes one or more arrays 630 of memory cells.The memory cells of the array 630 may comprise non-volatile memory cells(e.g., flash memory cells with floating gate transistors or charge traptransistors) according to various embodiments of the invention. Thememory device 600 can be a NAND memory device. The array 630 can includemultiple banks and blocks of memory cells residing on a single die or onmultiple dice as part of the memory device 600. The memory cells in thearray 630 can be single level (SLC) or multilevel (MLC) memory cells, orcombinations thereof. The array 630 can include one or more of theblocks 300 of strings 100 of memory cells 112 shown in FIG. 3. The firstsupply 240 and the second supply 250 can be coupled to the array 630.

An address circuit 635 can latch the address signals received on theaddress signal lines 620. The address signals can be decoded by a rowdecoder 640 and a column decoder 645 to access data stored in the array630. The memory device 600 can read data in the array 630 by sensingvoltage or current changes in memory cells in the array 630 using sensedevices in a sense/cache circuit 650.

A data input and output (I/O) circuit 655 implements bi-directional datacommunication over external (e.g., data I/O) nodes 660 coupled to thedata bus 625. The I/O circuit 655 can include driver and receivercircuits 665. The memory device 600 includes a controller that isconfigured to support operations of the memory device 600, such aswriting data to and/or erasing data from the array 630. The controllercan comprise, for example, control circuitry 670 (e.g., configured toimplement a state machine) on a same or different die than that whichincludes the array 630 and/or any or all of the other components of thememory device 600. The controller can comprise the control circuitry670, firmware, software or combinations of any or all of the foregoing.Data can be transferred between the sense/cache circuit 650 and the I/Ocircuit 655 over signal lines 646. The first supply 240 and the secondsupply 250 can be controlled by the controller. Embodiments of theinvention shown in FIGS. 1-5 can be implemented using the controller,such as where the controller is configured to cause one or more of theacts of the disclosed methods to be performed.

Each driver and receiver circuit 665 includes a driver circuit 675.Control signals can be provided to the driver circuits 675 (e.g.,through control logic 680 that is coupled to the control circuitry 670).The control logic 680 can provide the control signals over lines 685 and690 to the driver circuits 675.

Although the invention has been described with reference to specificexample embodiments, it will be evident that various modifications andchanges may be made to these embodiments without departing from thebroader scope of the invention. Accordingly, the specification anddrawings are to be regarded in an illustrative rather than a restrictivesense. The accompanying drawings that form a part hereof, show by way ofillustration, and not of limitation, specific embodiments in which thesubject matter may be practiced. The embodiments illustrated aredescribed in sufficient detail to enable those skilled in the art topractice the teachings disclosed herein. Other embodiments may beutilized and derived therefrom, such that structural and logicalsubstitutions and changes may be made without departing from the scopeof this disclosure. This Detailed Description, therefore, is not to betaken in a limiting sense, and the scope of various embodiments isdefined only by the appended claims, along with the full range ofequivalents to which such claims are entitled.

Such embodiments of the inventive subject matter may be referred toherein, individually and/or collectively, by the term “invention” merelyfor convenience and without intending to voluntarily limit the scope ofthis application to any single invention or inventive concept if morethan one is in fact disclosed. Thus, although specific embodiments havebeen illustrated and described herein, it should be appreciated that anyarrangement calculated to achieve the same purpose may be substitutedfor the specific embodiments shown. This disclosure is intended to coverany and all adaptations or variations of various embodiments.Combinations of the above embodiments, and other embodiments notspecifically described herein, will be apparent to those of skill in theart upon reviewing the above description.

Plural instances may be provided for components, operations, orstructures described herein as a single instance. Finally, boundariesbetween various components, operations, and data stores may be somewhatarbitrary, and particular operations may be illustrated in the contextof specific illustrative configurations. Other allocations offunctionality are envisioned and may fall within the scope of theinvention(s). In general, structures and functionality presented asseparate components in the exemplary configurations may be implementedas a combined structure or component. Similarly, structures andfunctionality presented as a single component may be implemented asseparate components. These and other variations, modifications,additions, and improvements fall within the scope of the invention(s).One or more features from any embodiment may be combined with one ormore features of any other embodiment without departing from the scopeof the disclosure.

In this document, the terms “a” or “an” are used, as is common in patentdocuments, to include one or more than one. In this document, the term“or” is used to refer to a nonexclusive or, such that “A or B” includes“A but not B,” “B but not A,” and “A and B,” unless otherwise indicated.Furthermore, all publications, patents, and patent documents referred toin this document are incorporated by reference herein in their entirety,as though individually incorporated by reference. In the event ofinconsistent usages between this document and those documents soincorporated by reference, the usage in the incorporated reference(s)should be considered supplementary to that of this document; forirreconcilable inconsistencies, the usage in this document controls.

The Abstract of the Disclosure is provided to comply with rulesrequiring an abstract that will allow the reader to quickly ascertainthe nature of the technical disclosure. It is submitted with theunderstanding that it will not be used to interpret or limit the scopeor meaning of the claims. In addition, in the foregoing DetailedDescription, it can be seen that various features are grouped togetherin a single embodiment for the purpose of streamlining the disclosure.This method of disclosure is not to be interpreted as reflecting anintention that the claimed embodiments require more features than areexpressly recited in each claim. Rather, as the following claimsreflect, inventive subject matter lies in less than all features of asingle disclosed embodiment. Thus the following claims are herebyincorporated into the Detailed Description, with each claim standing onits own as a separate embodiment.

What is claimed is:
 1. An apparatus, comprising: a memory structurecomprising multiple blocks of memory cell strings, wherein the blocks ofmemory cells strings respectively comprise multiple sub-blocks of memorycell strings, wherein the memory cell strings respectively comprisemultiple memory cells extending between a first select gate between asource and a first end of the memory cells, and a second select gatebetween a data line and a second end of the memory cells, and whereinthe memory cells strings further comprise a respective a common channelmaterial; and a memory device controller, comprising control circuitryconfigured to perform operations on the memory structure, comprising:during a first portion of a programming operation in a selectedsub-block of memory cells strings, precharging channel material ofmemory cell strings in both the selected sub-block and an unselectedsub-block in a block of memory cells to a precharge voltage; and duringa second portion of the programming operation, after precharging thechannel material of the strings of memory cells in the selectedsub-block and the unselected sub-block, applying a programming voltageto an access line of a selected memory cell in the selected sub-block;wherein the selected memory cell in the selected sub-block and anunselected memory cell in the unselected sub-block are coupled to theaccess line, and wherein during the second portion of the programingoperation, the channel material in the unselected sub-block is chargedto a first voltage higher than the precharge voltage in response to acoupled voltage induced on the channel material in the unselectedsub-block as a result of the programming voltage on the selected accessline of the selected memory cell in the selected sub-block.
 2. Theapparatus of claim 1, wherein the precharging further comprises enablinga select gate of a string of memory cells in the unselected sub-block tocouple the precharge voltage to the channel material of the string ofmemory cells in the unselected sub-block.
 3. The apparatus of claim 1,further comprising allowing the channel material of the string of memorycells in the unselected sub-block to float during the second portion ofthe programming operation.
 4. The apparatus of claim 3, wherein allowingthe channel material of the string of memory cells in the unselectedsub-block to float comprises grounding a select line coupled to a selectgate of the string of memory cells in the unselected sub-block.
 5. Theapparatus of claim 1, further comprising applying a program enablevoltage to a data line during the programming operation, wherein thedata line is coupled to strings of memory cells in the unselectedsub-block and in the selected sub-block.
 6. The apparatus of claim 5,wherein applying a program enable voltage to the data line comprisescoupling the data line to a ground of a memory device including theblock of memory cells.
 7. The apparatus of claim 6, further comprisingenabling a select gate in a string of memory cells to couple the programenable voltage to channel material of the selected memory cell duringthe programming operation.
 8. A memory structure, comprising: a block ofvertically-extending memory cell strings, the block including multiplesub-blocks selecting a sub-block of multiple sub-blocks within a blockof multiple strings of memory cells, each memory cell string including apillar of semiconductor channel material, and extending between a sourceand a data line, wherein each memory cell in a vertical string iscoupled to a respective access line, and wherein access lines connect tomemory cells in multiple sub-blocks; a memory device controller,comprising control circuitry configured to perform operations on thememory structure, comprising: during an initial part of a programmingoperation, precharging the pillar of multiple memory cell strings inmultiple sub-blocks in the block by applying a precharge voltage to thepillar of the memory cells strings; and after precharging of the pillarof each of the multiple memory cell strings in the multiple sub-blocks,applying a programming voltage to a selected access line coupled to aselected memory cell in the selected sub-block during a subsequent partof the programming operation, and wherein during the subsequent part ofthe programing operation, the pillar of an unselected memory cell stringin an unselected sub-block is charged to a first voltage higher than theprecharge voltage in response to a coupled voltage induced on thechannel material by the programming voltage on the selected access lineof the selected sub-block.
 9. The memory structure of claim 8, whereinthe selected access line is coupled to the unselected memory cell in theunselected sub-block.
 10. The memory structure of claim 8, wherein thechannel material of the strings of memory cells in both the selectedsub-block and the unselected sub-block is precharged to the prechargevoltage during the initial part of the programming operation.
 11. Thememory structure of claim 10, wherein the operations further compriseallowing the pillar of the memory cells strings in the unselectedsub-block to float during the subsequent part of the programmingoperation.
 12. The memory structure of claim 11, wherein the allowingthe pillars of the memory cells strings in the unselected sub-blockduring a subsequent part of the programming operation comprises placingrespective drain select gates of memory cells strings of the unselectedsub-block in a non-conducting state.
 13. The memory structure of claim12, wherein the operations comprise, during the subsequent part of theprograming operation, placing the drain select gate of the selectedmemory cell string in a conducting state.
 14. A memory device,comprising: a memory array comprising, a block comprising, multiplestrings of NAND memory cells in at least first and second sub-blocks,the multiple strings of NAND memory cells extending between a source andan associated data line of multiple data lines, each string including,multiple NAND memory cells, a source select gate between the multipleNAND memory cells and the source, a drain select gate between the NANDmemory cells and the associated data line, and channel material forminga pillar of the NAND memory cell string; and multiple access linescoupled to respective memory cells in both of the first sub-block andthe second sub-block; a memory device controller, comprising controlcircuitry configured to perform operations comprising performing aprogramming operation on a selected memory cell in a selected string ofa selected sub-block of the first and second sub-blocks, the programmingoperation comprising a first portion and a second portion, wherein thefirst portion of the programming operation comprises pre-charging thechannel material of multiple strings of memory cells in both theselected sub-block and an unselected sub-block with a precharge voltage,comprising placing the drain select gates of the memory cells strings ina conducting state, and applying a precharge voltage to the data linesin both the selected sub-block and the unselected sub-block; wherein thesecond portion of the programming operation comprises, after prechargingthe channel material of the strings of memory cells in the selectedsub-block and the unselected sub-block, allowing strings of memory cellsin the unselected sub-block to float; maintaining an elevated voltage ondata lines not coupled to the selected string containing the selectedmemory cell; and applying a programming voltage to a first access linecoupled to the selected memory cell in the selected sub-block of theblock of memory cells and to at least one unselected memory cell in theunselected sub-block; and while applying the programming voltage to thefirst access line, placing the drain select gate of the selected stringin a conductive state.
 15. The memory device of claim 14, whereinallowing strings of memory cells in the memory cells strings in theunselected sub-block to float comprises placing the drain select gatesof the memory cell strings in a non-conducting state.
 16. The memorydevice of claim 14, wherein the first portion of the programmingoperation further comprises applying a third voltage to the selectedaccess line and to multiple unselected access lines to establish aconducting condition in channels of the memory cells coupled to theaccess lines.
 17. The memory device of claim 16, further comprisingapplying an elevated voltage on the unselected access lines during thesecond portion of the programming operation, wherein the elevatedvoltage is less than the programming voltage.
 18. The memory device ofclaim 17, wherein the elevated voltage applied to the unselected accesslines during the second portion of the programming operation is thethird voltage applied during the first portion of the programmingoperation.
 19. The memory device of claim 14, wherein during the secondportion of the programming operation the pillar of an unselected memorycell string in an unselected sub-block is charged to a first voltagehigher than the precharge voltage in response to a coupled voltageinduced on the pillar by the programming voltage on the selected accessline of the selected sub-block.